Shape Dependence of Sensitivity and Strength on a Piezoresistive Semiconductor Accelerometer

Design and Analysis of MEMS-Based Piezoresistive Accelerometer with Low Cross-Axis Sensitivity

This paper presents a design and development of a high-performance silicon piezoresistive MEMS accelerometer, with a finite element analysis (FEA) and low cross-axis sensitivity. Finite element analysis is used to simulate electro statically actuated piezoresistive accelerometer operating under dc conditions .The designs presented in this paper consist of a square shaped proof mass with flexure...

Design and fabrication of a GaAs/Al0.4Ga0.6As micro-accelerometer based on piezoresistive effect

In this paper, a novel piezoresistive accelerometer based on the piezoresistive effect of GaAs/Al0.4Ga0.6As thin films was designed. The piezoresistive accelerometer contains four suspended flexural beams and a central proof mass configuration. The piezoresistive effect of a piezoresistor or thin film was used to make a resistor changing the output that is proportional to applied acceleration. ...

A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency

For improving the tradeoff between the sensitivity and the resonant frequency of piezoresistive accelerometers, the dependency between the stress of the piezoresistor and the displacement of the structure is taken into consideration in this paper. In order to weaken the dependency, a novel structure with suspended piezoresistive beams (SPBs) is designed, and a theoretical model is established f...

Development of a Novel Two Axis Piezoresistive Micro Accelerometer Based on Silicon

This paper describes the design, simulation, fabrication and test results of a novel MEMS two axis accelerometer, which is based on piezoresistive detection. This kind of sensor consists of four vertical cantilever beams with attached plastic cylinder in the center of the structure. A simplified analytical model is established to describe the accelerometer’s mechanical behaviour. Finite element...

Electron energy state dependence on the shape and size of semiconductor quantum dots